K. J. Vinoy

Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators which can react to environmental change under micro-circuit control. This book examines RF MEMS and their applications.

Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.

Due to its extensive applications in stealth technology, much of the research effort in radar absorbing materials (RAM) has remained classified. As is the wont with classified topics, it has resulted in much awe and unfounded speculation. The aim of this book is to demystify this topic. The book in hand is concise but complete in itself. The attention of the readers is first drawn towards the historical evolution of RAM to emphasize that the elementary principles of electromagnetics lead to the fundamental concepts of RAM. These also form the basis for further mathematical analysis and design of RAM. The performance plots for the various RAM designs, to the extent possible, are taken with respect to power reflection; this should facilitate comparison of their relative performances. In order to further induce the reader to take the first step towards RAM design, we have included the relevant computer codes in a companion diskette. This would enable the reader to try out elementary designs on his own. * . EXE files should facilitate ready execution of codes on most DOS based computing platforms. The corresponding source codes with comments are also included as * . FOR files. The reader may wish to modify some of these codes for examining RAM design algorithms further. We welcome comments from the reader on these codes.