V. V. Varadan

The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communication is booming. Focusing on microstereolithography, this timely work provides insight into state-of-the-art microfabrication techniques for 3D microstructures, microdevices and MEMS. * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units. * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding. * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers Microelectronics engineers will profit form this detailed overview of current technologies. Material technologists and physicists working in industrial and academic research and development will also find this a valuable reference source.

The development of high speed, high frequency circuits and systems requires an understanding of the properties of materials functioning at the microwave level. This comprehensive reference sets out to address this requirement by providing guidance on the development of suitable measurement methodologies tailored for a variety of materials and application systems. Bringing together coverage of a broad range of techniques in one publication for the first time, this book: *Provides a comprehensive introduction to microwave theory and microwave measurement techniques. *Examines every aspect of microwave material properties, circuit design and applications. *Presents materials property characterisation methods along with a discussion of the underlying theory. *Outlines the importance of microwave absorbers in the reduction in noise levels in microwave circuits and their importance within defence industry applications. *Relates each measurement technique to its application across the fields of microwave engineering, high-speed electronics, remote sensing and the physical sciences. This book will appeal to practising engineers and technicians working in the areas of RF, microwaves, communications, solid-state devices and radar. Senior students, researchers in microwave engineering and microelectronics and material scientists will also find this book a very useful reference.